TECO Dry Pump is designed for applications of semiconductor and general industry with oil-free operation.
TECO's pumps combine reliability and quality, based on 45 years experience in electric and machinery field.
For 100 series, pumping speed is 100 m3/hr r and ultimate pressure is 7.5mTorr(1Pa)

TECO Turbo Molecular Pump is designed for semiconductor applications with magnetic bearing operation.
TECO's TMP combine reliability and quality, based on 45 years experience in electric and machinery field.
For 1000 series, pumping speed is 1000 l/hr and ultimate pressure is <1.0×10-8

TECO's Temperature Control Systems incorporate solid-state thermoelectric technology. TECO's systems operate on the principle of thermoelectric cooling based on the "Peltier Effect", instead of using Ozone Depleting Chemical (ODCs) or Freon Gas. Thermoelectric devices are small solid-state heat pump. Temperature range is from -30℃ to 90℃ without freon usage and with Perfluorocarbon coolant for ion-free operation.