| |
Features & Benefits |
| |
¡E Touch Screen Display for Intuitive Programming |
| |
¡E Magn Etically Driven Coolant Pump |
| |
¡E Perfluorocarbon Coolant for Ion-Free Operation |
| |
¡E Meet SEMI-S2-200 safety |
| |
¡E Precise +/- 0.1¢J Stability at Idle |
| |
¡E All Stainless Steel Reservoir and Coolant Plumbing |
| |
¡E No CFC's, HCFC's, HFC's or other Freon Substitute
: All Solid State Design* |
| |
¡E Lower Power Consumption |
| |
¡E Smaller Footprint |
| |
¡E Higher Reliability |
| |
¡E Modulized Design Makes Easy Maintenance |