TMP
TECO Turbo Molecular Pump is designed for semiconductor applications with magnetic bearing operation.
TECO's TMP combine reliability and quality, based on 45 years experience in electric and machinery field.
For 1000 series, pumping speed is 1000 l/hr and ultimate pressure is <1.0¡Ñ10-8
  Features & Benefits
  ¡E Magnetic Bearing Makes Contact-free
  ¡E Rotor Machined with Round Bar
  ¡E Easy Maintenance
  ¡E Anti-corrosion Coating
  ¡E Flexible Installation
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