TECO Dry Pump is designed for applications of semiconductor and general industry with oil-free operation.
TECO's pumps combine reliability and quality, based on 45 years experience in electric and machinery field.
For 100 series, pumping speed is 100 m3/hr r and ultimate pressure is 7.5mTorr(1Pa)
  Feature and Advantage
  ¡E Lower Cost of Ownership
  ¡E Safety and Reliability
  ¡E Reduced Footprint
  ¡E Standard or CustomizedInterface
  ¡E Excellent Parts Availability by Localized Parts Supplier Chain
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